m2c microscopy measurement & calibration m2c microscopy measurement and calibration

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Veröffentlichungen

Turning Scanning Probe Microscopy into a more quantitative method

(COOMET Symposium, 2007)

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A 3D-Calibration Method for the Quantitative SPM Measurement of Hardness Intenders

(Journal of Metrology Society of India, Vol.23, No.3, 2007)

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A landmark-based 3D calibration strategy for SPM.

Meas. Sci. Technol. 18 (2007) S.404-414

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Eine neue 3D Kalibrierstrategie für Mikro- und Nanomessverfahren

(VDI Fachtagung: Messtechnik für Mikro- und Nano-Engineering, 2006)

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